Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977204 | Method of forming a fine pattern of a semiconductor device using a double patterning technique | Yong-Il Kim, Makoto Yoshida, Bong-Soo Kim | 2011-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977204 | Method of forming a fine pattern of a semiconductor device using a double patterning technique | Yong-Il Kim, Makoto Yoshida, Bong-Soo Kim | 2011-07-12 |