Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048783 | Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same | Yun-Mo Chung, Ki-Yong Lee, Min Jae Jeong, Jin-Wook Seo, Jong-Won Hong +12 more | 2011-11-01 |