Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025736 | Semiconductor device fabrication equipment for performing PEOX process and method including cleaning the equipment with remotely produced plasma | Kyoung-Hwan Chin, Kyoung-In Kim, Kyoung-Min An | 2011-09-27 |