Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919142 | Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same | Geun-Young Yeom, Byoung Jae Park, Kyeong-Joon Ahn | 2011-04-05 |