Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023182 | Device for collecting flux of electromagnetic radiation in the extreme ultraviolet | Roland Geyl, Vincent Patoz, François Dufresne De Virel | 2011-09-20 |
| 7982855 | Illuminator for a photolithography device | Miguel Boutonne, Renaud Mercier Ythier | 2011-07-19 |