Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047076 | Acceleration sensor and method of fabricating it | Yasuhiro Yoshikawa | 2011-11-01 |
| 7977757 | MEMS element, MEMS device and MEMS element manufacturing method | Yasuhiro Yoshikawa | 2011-07-12 |