Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012666 | Compositions and processes for photolithography | Michael K. Gallagher | 2011-09-06 |
| 7968268 | Compositions and processes for immersion lithography | — | 2011-06-28 |
| 7955778 | Compositions and processes for photolithography | Michael K. Gallagher | 2011-06-07 |