Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035209 | Micromechanical device which has cavities having different internal atmospheric pressures | Ralf Hausner | 2011-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035209 | Micromechanical device which has cavities having different internal atmospheric pressures | Ralf Hausner | 2011-10-11 |