Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035821 | Interferometric system having a reference surface including a mirrored zone | Ulrich Kallmann, Rahmi Gencoglu, Uwe Kasten | 2011-10-11 |
| 7898671 | Interferometer having a mirror system for measuring a measured object | — | 2011-03-01 |