Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981308 | Method of etching a device using a hard mask and etch stop layer | — | 2011-07-19 |
| 7956428 | Microelectromechanical devices and fabrication methods | — | 2011-06-07 |
| 7875482 | Substrate with multiple encapsulated pressures | Robert N. Candler | 2011-01-25 |