Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863714 | Monolithic MEMS and integrated circuit device having a barrier and method of fabricating the same | Matthew A. Zeleznik | 2011-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863714 | Monolithic MEMS and integrated circuit device having a barrier and method of fabricating the same | Matthew A. Zeleznik | 2011-01-04 |