Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8061013 | Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating | Farrokh Ayazi | 2011-11-22 |
| 8063720 | MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency | Farrokh Ayazi | 2011-11-22 |