Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981700 | Semiconductor oxidation apparatus and method of producing semiconductor element | Shunichi Sato, Naoto Jikutani, Akihiro Itoh, Shinya Umemoto, Takatoshi Yamamoto | 2011-07-19 |