Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035280 | MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions | Sheng-Shian Li, Kushal Bhattacharjee | 2011-10-11 |
| 7990232 | Anchor/support design for MEMS resonators | — | 2011-08-02 |
| 7898158 | MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions | Sheng-Shian Li, Kushal Bhattacharjee | 2011-03-01 |