Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973415 | Manufacturing process and structure of through silicon via | Michihiro Kawashita, Yasuhiro Yoshimura, Naotaka Tanaka, Takahiro Naito | 2011-07-05 |
| 7897509 | Semiconductor wafer and method of manufacturing the same and method of manufacturing semiconductor device | Naotaka Tanaka, Kenji Kanemitsu, Takafumi Kikuchi | 2011-03-01 |