Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071264 | Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask | Mitsuru Okuno | 2011-12-06 |
| 7935462 | Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask | Mitsuru Okuno | 2011-05-03 |