Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981472 | Methods of providing uniform gas delivery to a reactor | Jeremie J. Dalton, M. Ziaul Karim | 2011-07-19 |
| 7981473 | Transient enhanced atomic layer deposition | Gi Youl Kim, Anuranjan Srivastava, Thomas E. Seidel, Sasangan Ramanathan | 2011-07-19 |