Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7954219 | Substrate holder assembly device | Russell Edward Barbaria, Ralf Erz, Markus K. Tilsch | 2011-06-07 |
| 7879209 | Cathode for sputter coating | Markus K. Tilsch, Georg J. Ockenfuss, Robert E. Hahn | 2011-02-01 |