Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947576 | Method of manufacturing by etching a semiconductor substrate horizontally without creating a vertical face | Tomoki Igari, Mitsuhiko Ogihara, Hiroyuki Fujiwara, Takahito Suzuki, Tomohiko Sagimori +1 more | 2011-05-24 |