Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943017 | Method for operating a pulsed arc evaporation source and vacuum process system comprising said pulsed arc evaporation source | Jurgen Ramm, Beno Widrig, Volker Derflinger, Andreas Reiter | 2011-05-17 |