Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7997890 | Device and method for lithography | Marc Beck | 2011-08-16 |
| 7972553 | Method for imprint lithography at constant temperature | Marc Beck, Erik Bolmsjö, Erik Theander | 2011-07-05 |