Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066430 | Semiconductor substrate temperature determination | Meindert Martin Lunenborg, Jean-Philippe Jacquemin | 2011-11-29 |
| 7951729 | Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereor, and material for coupling a dielectric layer and a metal layer in a semiconductor device | János Farkas, Cindy Goldberg | 2011-05-31 |
| 7883393 | System and method for removing particles from a polishing pad | Sebastien Petitdidier, János Farkas, Silvio Del Monaco | 2011-02-08 |