Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007588 | Vapor-phase epitaxial growth method and vapor-phase epitaxy apparatus | Hideki Ito, Satoshi Inada | 2011-08-30 |
| 7923355 | Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device | Masayoshi Yajima | 2011-04-12 |