Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008631 | Method of acquiring offset deflection amount for shaped beam and lithography apparatus | Takahito Nakayama, Kenji Ohtoshi, Shunji Shinkawa | 2011-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008631 | Method of acquiring offset deflection amount for shaped beam and lithography apparatus | Takahito Nakayama, Kenji Ohtoshi, Shunji Shinkawa | 2011-08-30 |