Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065635 | Method for resizing pattern to be written by lithography technique, and charged particle beam writing method | Junichi Suzuki, Takayuki Abe | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065635 | Method for resizing pattern to be written by lithography technique, and charged particle beam writing method | Junichi Suzuki, Takayuki Abe | 2011-11-22 |