Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7913987 | Substrate mounting table for plasma processing apparatus, plasma processing apparatus and insulating film forming method | Takashi Suzuki, Ryo Yamasaki | 2011-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7913987 | Substrate mounting table for plasma processing apparatus, plasma processing apparatus and insulating film forming method | Takashi Suzuki, Ryo Yamasaki | 2011-03-29 |