Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033771 | Minimum contact area wafer clamping with gas flow for rapid wafer cooling | Charles E. Pomeroy, David Cohen, Nagarajan Kalyanasundaram | 2011-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033771 | Minimum contact area wafer clamping with gas flow for rapid wafer cooling | Charles E. Pomeroy, David Cohen, Nagarajan Kalyanasundaram | 2011-10-11 |