Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935944 | Ion beam irradiating apparatus, and method of producing semiconductor device | Junzo Ishikawa, Yasuhito Gotoh, Shigeki Sakai | 2011-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935944 | Ion beam irradiating apparatus, and method of producing semiconductor device | Junzo Ishikawa, Yasuhito Gotoh, Shigeki Sakai | 2011-05-03 |