Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048615 | Silicon-containing resist underlayer coating forming composition for forming photo-crosslinking cured resist underlayer coating | Yusuke Horiguchi, Keisuke Hashimoto, Makoto Nakajima | 2011-11-01 |
| 8007979 | Acrylic polymer-containing gap fill material forming composition for lithography | Kazuhisa Ishii, Takahiro Kishioka, Yasushi Sakaida | 2011-08-30 |