Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026047 | Resist pattern forming method, supercritical processing solution for lithography process, and antireflection film forming method | Mitsuru Sato | 2011-09-27 |
| 7977036 | Resist pattern forming method | Mitsuru Sato | 2011-07-12 |