Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059269 | Particle inspection apparatus, exposure apparatus, and device manufacturing method | — | 2011-11-15 |
| 7936452 | Inspection apparatus, exposure apparatus, and method of manufacturing device | — | 2011-05-03 |
| 7913547 | Engine rotating meter | Masao Iwata, Fumitake Matsuda, Toshiyuki Takano | 2011-03-29 |