Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040490 | Liquid immersion exposure apparatus, exposure method, and method for producing device | — | 2011-10-18 |
| 8013975 | Exposure apparatus, exposure method, and method for producing device | — | 2011-09-06 |
| 7872730 | Immersion exposure apparatus and immersion exposure method, and device manufacturing method | — | 2011-01-18 |