Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072578 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Masahiko Yasuda | 2011-12-06 |
| 8059260 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Masahiko Yasuda | 2011-11-15 |
| 8054465 | Position measurement method | Masahiko Yasuda | 2011-11-08 |