Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915189 | Yttrium oxide material, member for semiconductor-manufacturing apparatus, and method for producing yttrium oxide material | Yuji Katsuda | 2011-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915189 | Yttrium oxide material, member for semiconductor-manufacturing apparatus, and method for producing yttrium oxide material | Yuji Katsuda | 2011-03-29 |