Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022001 | Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same | Toru Hayase, Yuji Katsuda | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022001 | Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same | Toru Hayase, Yuji Katsuda | 2011-09-20 |