Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7990233 | MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal | — | 2011-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7990233 | MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal | — | 2011-08-02 |