Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8009285 | Photomask mounting/housing device and resist inspection method and resist inspection apparatus using same | Yoshikazu Katou, Takahiro Igeta, Ryuji Hasegawa | 2011-08-30 |