Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943516 | Manufacturing method for semiconductor device | Tatsuya Suzuki, Takuo Ohwada, Kaoru Ikegami, Norio Ishikawa | 2011-05-17 |
| 7862658 | Etching and cleaning methods and etching and cleaning apparatuses used therefor | Shinya Yamasaki | 2011-01-04 |