Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025269 | Chamber lid lifting apparatus | — | 2011-09-27 |
| 7933685 | System and method for calibrating a wafer handling robot and a wafer cassette | Christopher Qualey | 2011-04-26 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025269 | Chamber lid lifting apparatus | — | 2011-09-27 |
| 7933685 | System and method for calibrating a wafer handling robot and a wafer cassette | Christopher Qualey | 2011-04-26 |