Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7884023 | System and method for using siliciding PECVD silicon nitride as a dielectric anti-reflective coating and hard mask | Heather McCulloh, Steven J. Adler, Henry G. Prosack, Jr. | 2011-02-08 |