Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982291 | Method for manufacturing a microelectromechanical component, and a microelectromechanical component | — | 2011-07-19 |
| 7932568 | Microelectromechanical component | Jiri Niemistö | 2011-04-26 |