Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8051692 | Shape detection device and shape detection method | Kanji Hayashi, Shigeki Sueda, Hideaki Furumoto, Junichi Nishizaki, Nobuyoshi Goshima | 2011-11-08 |
| 7907276 | Film quality evaluation method, apparatus therefor, and production system for thin-film device | Satoshi Sakai, Masami Iida, Kohei Kawazoe | 2011-03-15 |