Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017305 | Pattern forming method, semiconductor device manufacturing method and exposure mask set | Takayuki Saito, Maya Itoh, Shuji Nakao | 2011-09-13 |
| 7935636 | Method of fabricating semiconductor device | — | 2011-05-03 |