Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7965372 | Apparatus for removing photoresist film | Seiji Noda, Izumi Oya, Makoto Miyamoto | 2011-06-21 |
| 7922979 | Silent discharge plasma apparatus | Noboru Wada, Hajime Nakatani, Hiroyuki Igehara, Norimitsu Esaki, Shingo MINE +1 more | 2011-04-12 |