Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049181 | Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system | — | 2011-11-01 |
| 7959838 | Epoxy resin for prepreg, prepreg, fiber-reinforced composite material and methods for production thereof | Tsuneo Takano, Akitada Yanase, Tadashi Sakai, Kiharu Numata, Akihiro Ito +3 more | 2011-06-14 |