Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017184 | β-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same | Dan B. Millward | 2011-09-13 |
| 8003521 | Semiconductor processing | Eugene P. Marsh | 2011-08-23 |