Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947190 | Methods for polishing semiconductor device structures by differentially applying pressure to substrates that carry the semiconductor device structures | — | 2011-05-24 |
| 7935216 | Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods | — | 2011-05-03 |