Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049258 | Disposable pillars for contact formation | John K. Zahurak | 2011-11-01 |
| 7972753 | Masks for microlithography and methods of making and using such masks | William A. Stanton, Zhong Shi | 2011-07-05 |
| 7883822 | Graded lithographic mask | Stuart M. Jacobsen | 2011-02-08 |