Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058729 | Titanium nitride films | Eugene P. Marsh | 2011-11-15 |
| 7989290 | Methods for forming rhodium-based charge traps and apparatus including rhodium-based charge traps | Eugene P. Marsh | 2011-08-02 |
| 7923070 | Atomic layer deposition method of forming conductive metal nitride-comprising layers | Eugene P. Marsh | 2011-04-12 |