Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952694 | Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials | Eric A. Pape, Siwen Li | 2011-05-31 |
| 7884925 | Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials | Eric A. Pape, Siwen Li | 2011-02-08 |